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Instrumentation & Valves

Model MS-500 Oxygen for Semiconductors, LCD, and Electronic Components

Update Terakhir
:
18 / 04 / 2024
Min. Pembelian
:
1 Unit
Dilihat Sebanyak
:
49 kali

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Detail Model MS-500 Oxygen For Semiconductors, LCD, And Electronic Components

Model MS-500 Oxygen for Semiconductors, LCD, and Electronic Components

MS-500_Specifications

Measurement principle Battery-powered zirconia oxygen analyzer
Type Separate-type (converter: wall-mounted; sensor: direct insertion type)
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2; 10-20 to 10-0atm
Automatic range
Repeatability Within ±0.5% of full scale; range of 0-1% or more
Within ±1% of full scale or ±0.1ppm, whichever is larger; range of less than 0-1%
Concentrations in the range of 0-1ppm, atm are not under the warranty range
Number of measurement points 1-8
Sample gas requirements Pressure: 10-3-200KPa(absolute pressure)
Flow rate: 0.5-5,000mL/min or 0mL/min (measurement in state of natural dispersion)
Humidity: Dew point below ambient temperature
Temperature: 0-100℃
Others: Not to contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable ingredients (including gas), oil or moisture
Reference gas Atmospheric air
Recorder output Transmission output only
Transmission output RS-232C
Alarm output None
Warmup time Under 6 min.
Dimensions MS-500 (controller): 92(W)×44(H)×120(D)mm (excludes protruding parts)
MS-510 (converter): 100(W)×40(H)×88(D)mm (excludes protruding parts)
Sensor unit:
SD16NW: Overall length 100mm (sensor Φ 11×39, body Φ 40×51)
SD25NW: Overall length 100mm (sensor Φ 11×42, body Φ 40×48)
SD40NW: Overall length 100mm (sensor Φ 11×41, body Φ 40×49)
Weight MS-500 (controller): Approx. 0.6 kg
MS-510 (converter): Approx. 0.5 kg
Sensor unit:
SD16NW: Approx. 0.2 kg
SD25NW: Approx. 0.2 kg
SD40NW: Approx. 0.35 kg
External connection Any of the vacuum flanges (NW16, 25 or 40)
Power 24VDC±10%

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MS-500 for Semiconductors, LCD, and Electronic Components
Gas Analyzer

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